Effects of oxygen vacancy diffusion on leakage characteristics of Pt/(Ba0.5Sr0.5)TiO3/Pt capacitor

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 5 A, 2000, Pages

  Maruno, Shigemitsu ^a   Murao, Takeshi ^a   Kuroiwa, Takeharu ^a   Mikami, Noboru ^a   Tomikawa, Akihiko ^a   Nagata, Michihiko ^a   Yasue, Tsuneo ^a   Koshikawa, Takanori ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BARIUM TITANATE; CURRENT VOLTAGE CHARACTERISTICS; DIFFUSION IN SOLIDS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC FIELD EFFECTS; INTERFACES (MATERIALS); LEAKAGE CURRENTS; OXYGEN; PLATINUM; POINT DEFECTS; THIN FILMS;

SCHOTTKY EMISSION;

CAPACITORS;

EID: 0033715281     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l416     Document Type: Article

References (10)