Analytical description of anti-scattering and scattering bar assist features

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Petersen, John S ^a  

^a Petersen Advanced Lithography Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FEATURE EXTRACTION; FOURIER OPTICS; IMAGING SYSTEMS; MASKS; PHASE SHIFT;

ASSIST FEATURES; BINARY MASKS; OPTICAL PROXIMITY CORRECTIONS; SCATTERING BARS;

PHOTOLITHOGRAPHY;

EID: 0033715234     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)