Materials options for dielectrics in integrated capacitors

Proceedings of the International Symposium and Exhibition on Advanced Packaging Materials Processes, Properties and Interfaces

Volumn , Issue , 2000, Pages 38-43

  Ulrich, Richard ^a   Schaper, Len ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CAPACITANCE; CAPACITORS; DIELECTRIC FILMS; EPOXY RESINS; FERROELECTRIC MATERIALS; MICROELECTRONIC PROCESSING; PERMITTIVITY; PLASTIC FILMS; POLYIMIDES; POWDERS; SILICA;

INTEGRATED CAPACITORS;

ELECTRONICS PACKAGING;

EID: 0033713575     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)