New detection method for the 2-dimensional beam shape

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 676-684

  Someda, Yasuhiro ^a   Sohda, Yasunari ^a   Satoh, Hidetoshi ^a   Saitou, Norio ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MASKS; MEMBRANES; MONTE CARLO METHODS; OPTICAL RESOLVING POWER;

BEAM SHAPE DETECTION METHOD; TRANSMITTANCE MEMBRANES;

ELECTRON BEAM LITHOGRAPHY;

EID: 0033713417     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)