Integration of waveguide type wavelength demultiplexing photodetectors by selective intermixing of InGaAs/InGaAsP quantum well structure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4078, Issue , 2000, Pages 313-320

  Yeo, Deok Ho ^a   Yoon, Kyung Hun ^a   Kim, Hang Ro ^a   Kim, Sung June ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTICS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL WAVEGUIDES; PHOTODETECTORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE STRUCTURES; WAVELENGTH DIVISION MULTIPLEXING;

INDIUM GALLIUM ARSENIC PHOSPHIDE; QUANTUM WELL INTERMIXING;

SEMICONDUCTOR QUANTUM WELLS;

EID: 0033713225     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.392157     Document Type: Conference Paper

References (8)