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Volumn 16, Issue 1, 2000, Pages 19-22
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Nucleation and oriented textured growth of diamond films on Si(100) via electron emission in hot filament chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ELECTRON EMISSION;
EPITAXIAL GROWTH;
FILM GROWTH;
NUCLEATION;
SILICON;
SUBSTRATES;
HETEROEPITAXIAL DIAMOND FILMS;
HETEROEPITAXIAL GROWTH;
HOT FILAMENT CHEMICAL VAPOR DEPOSITION;
ORIENTED DIAMOND FILMS;
ORIENTED TEXTURED GROWTH;
TEXTURED DIAMOND FILMS;
DIAMOND FILMS;
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EID: 0033712493
PISSN: 10050302
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (3)
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References (14)
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