Continuous Image Writer - a new approach to fast direct writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000 (II), Issue , 2000, Pages 866-873

  Paufler, Joerg ^a   Brunn, Stefan ^a   Bolle, Joachim ^a   Koerner, Tim ^a   Baudach, Aenne ^a   Lindner, Reiner ^a  

^a SENTECH INSTRUMENTS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; IMAGE PROCESSING; LIGHT MODULATION; LIGHT MODULATORS; MASKS; SILICON WAFERS; SUBSTRATES;

CONTINUOUS IMAGE WRITERS (CIW); MASKMAKING;

PHOTOLITHOGRAPHY;

EID: 0033712142     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.389081     Document Type: Conference Paper

References (4)