Multi-layer spiral inductors in a high-precision, fully-planar MCM-D process

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2000, Pages 1055-1058

  Gouker, M ^a   Konistis, K ^a   Knecht, J ^a   Kushner, L ^a   Travis, L ^a  

^a MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED RESISTORS; SPIRAL INDUCTORS;

CAPACITORS; DRY ETCHING; ELECTRIC RESISTANCE; ELECTRONICS PACKAGING; MULTICHIP MODULES; RESISTORS;

ELECTRIC INDUCTORS;

EID: 0033710158     PISSN: 0149645X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MWSYM.2000.863538     Document Type: Article

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