Imaging of micro-discharge in a micro-gap of electrostatic actuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 651-656

  Ono, Takahito ^a   Sim, Dong Youn ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTROSTATIC DEVICES; IMAGING TECHNIQUES; IONIZATION;

ELECTROSTATIC ACTUATORS; MICRODISCHARGES;

ACTUATORS;

EID: 0033708686     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)