Nondestructive measurement of in-plane residual stress in silicon strips

Materials Research Society Symposium - Proceedings

Volumn 591, Issue , 2000, Pages 283-287

  Zheng, Tieyu ^a   Danyluk, Steven ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; IMAGE PROCESSING; NONDESTRUCTIVE EXAMINATION; POISSON RATIO; POLYNOMIALS; REGRESSION ANALYSIS; RESIDUAL STRESSES; SEMICONDUCTING SILICON; TWO DIMENSIONAL;

CARRE PHASE STEPPING SCHEME; SHADOW MOIRE TECHNIQUE;

THIN FILMS;

EID: 0033708128     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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