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Volumn 3985, Issue , 2000, Pages 142-151
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Smart flexible microrobots for Scanning Electron Microscope (SEM) applications
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CLOSED LOOP CONTROL SYSTEMS;
COMPUTER CONTROL SYSTEMS;
ELECTRON BEAMS;
FLANGES;
FLEXIBLE STRUCTURES;
MICROACTUATORS;
MOBILE ROBOTS;
PERSONAL COMPUTERS;
PIEZOELECTRIC DEVICES;
REAL TIME SYSTEMS;
SCANNING ELECTRON MICROSCOPY;
AUTOMATIC REAL TIME CONTROL;
FLEXIBLE ASSEMBLY FACILITY;
PIEZOELECTRIC ACTUATOR;
SMART FLEXIBLE MICROROBOT;
TRIANGULATION METHOD;
VACUUM CHAMBER;
INTELLIGENT ROBOTS;
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EID: 0033708057
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.388818 Document Type: Conference Paper |
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Times cited : (9)
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References (12)
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