Characterization of indium tin oxide film and practical ITO film by electron microscopy

Thin Solid Films

Volumn 370, Issue 1, 2000, Pages 155-162

  Nakao, T ^a   Nakada, T ^a   Nakayama, Y ^a   Miyatani, K ^a   Kimura, Y ^a   Saito, Y ^b   Kaito, C ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; EVAPORATION; HIGH RESOLUTION ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; SOLAR CELLS; TRANSMISSION ELECTRON MICROSCOPY; VACUUM APPLICATIONS;

CRYSTALLOGRAPHIC SHEAR STRUCTURES; INDIUM OXIDE FILM; VACUUM EVAPORATION;

SEMICONDUCTING FILMS;

EID: 0033707753     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00951-2     Document Type: Article

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