Aluminum-hollow fiber delivery system for excimer lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3911, Issue , 2000, Pages 292-297

  Matsuura, Yuji ^a   Yamamoto, Takashi ^a   Miyagi, Mitsunobu ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; EXCIMER LASERS; LIGHT; LIGHT TRANSMISSION; METALLIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL FIBER FABRICATION; OPTICAL GLASS;

ALUMINUM FILM; ALUMINUM HOLLOW FIBER DELIVERY SYSTEM; DIMETHYLETHYLAMINE ALANE; POWER DELIVERY; SILICA GLASS;

FIBERS;

EID: 0033707230     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (18)