Method for optical CMM calibration using a grid plate

CIRP Annals - Manufacturing Technology

Volumn 49, Issue 1, 2000, Pages 399-402

  Zhang, G X ^a   Fu, J Y ^b  

^a TIANJIN UNIVERSITY   (China)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; ERROR ANALYSIS; INTERFEROMETERS; LITHOGRAPHY; MEASUREMENT ERRORS; MICROPROCESSOR CHIPS; OPTICAL DEVICES;

OPTICAL COORDINATE MEASURING MACHINES (CMM);

MEASUREMENT THEORY;

EID: 0033702075     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62974-6     Document Type: Article

References (5)

1. Zhang, G., et al., 1985, Error Compensation of Coordinate Measuring Machines, Annals of the CIRP, 34/1:445-448.
2. Kunzmann, H., Trapet, E., Waldele, F., 1990, A Uniform Concept for Calibration, Acceptance Test, and Periodic Inspection of Coordinate Measuring Machines Using Reference Objects, Annals of the CIRP, 39/1:561-564.
3. Hansen, H.N., De Chiffre, L., 1997, A Combined Optical and Mechanical Reference Artefact for Coordinate Measuring Machines, Annals of the CIRP, 46/1:467-470.
4. Ye, J., 1996, Errors in High-Precision Mask Making and Metrology, PhD Thesis, Stanford Electronics Laboratory, Stanford University.
5. Zhang, G., et al., 1988, A Displacement Method for Machine Geometry Calibration, Annals of the CIRP, 37/1:515-518