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Volumn 3997, Issue , 2000, Pages 867-873
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EUV interferometry of a four-mirror ring-field EUV optical system
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROMAGNETIC WAVE DIFFRACTION;
INTERFEROMETERS;
MIRRORS;
PHASE SHIFT;
PROJECTION SYSTEMS;
ULTRAVIOLET RADIATION;
WAVEFRONTS;
EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL);
POINT-DIFFRACTION INTERFEROMETERS;
PHOTOLITHOGRAPHY;
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EID: 0033701350
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
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References (15)
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