EUV interferometry of a four-mirror ring-field EUV optical system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 867-873

  Goldberg, Kenneth A ^a   Naulleau, Patrick ^a   Batson, Phillip J ^a   Denham, Paul ^a   Anderson, Erik H ^a   Bokor, Jeffrey ^a   Chapman, Henry N ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; INTERFEROMETERS; MIRRORS; PHASE SHIFT; PROJECTION SYSTEMS; ULTRAVIOLET RADIATION; WAVEFRONTS;

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); POINT-DIFFRACTION INTERFEROMETERS;

PHOTOLITHOGRAPHY;

EID: 0033701350     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)