Performance of very high repetition rate ArF lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Hueber, Jean Marc ^a   Besaucele, Herve ^a   Das, Palash ^a   Eis, Rick ^a   Ershov, Alex ^a   Fleurov, Vladimir ^a   Gaidarenko, Dmitri ^a   Hofmann, Thomas ^a   Melcher, Paul ^a   Partlo, William ^a   Nikolaus, Bernd ^a   Smith, Scot ^a   Webb, Kyle ^a  

^a CYMER INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; HIGH POWER LASERS; SCANNING;

LINEWIDTH; VERY HIGH REPETITION RATE LASERS;

GAS LASERS;

EID: 0033701323     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)