Evaluation of the orientation of thermal deformation in the surface micromachined membrane of the gas microsensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 299-304

  Dumitrescu, Marius ^a   Cobianu, Cornel ^a   Pascu, Adrian ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPUTER SIMULATION; DEFORMATION; ENERGY UTILIZATION; FINITE ELEMENT METHOD; MICROMACHINING; MICROSENSORS;

BIMETAL EFFECTS; SURFACE MICROMACHINED MEMBRANES; THERMAL DEFORMATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0033700568     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)