Measurement of rate constants between atomic nitrogen and silane in a nitrogen discharge afterglow

Journal of Physics D: Applied Physics

Volumn 33, Issue 12, 2000, Pages 1499-1506

  Aubreton, J ^a   Conte, D ^a   Jauberteau, J L ^a   Jauberteau, I ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DISSOCIATION; ELECTRIC BREAKDOWN OF GASES; IONIZATION CHAMBERS; IONIZATION OF GASES; KINETIC THEORY; MASS SPECTROMETERS; MOLECULAR VIBRATIONS; MOLECULES; NITROGEN; ORDINARY DIFFERENTIAL EQUATIONS; SILANES;

ATOMIC NITROGEN; NITROGEN DISCHARGE AFTERGLOW; RUNGE-KUTTA-MERSON ALGORITHM;

RATE CONSTANTS;

EID: 0033700442     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/12/312     Document Type: Article

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