New λ/NA scaling equations for resolution and depth-of-focus

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000 (I), Issue , 2000, Pages 759-764

  Lin, B J ^a  

^a Linnovation Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; IMAGE ANALYSIS; IMAGE QUALITY; INVERSE PROBLEMS; MATHEMATICAL MODELS;

DEPTH OF FOCUS (DOF) SCALING; RAYLEIGH EQUATIONS;

PHOTOLITHOGRAPHY;

EID: 0033699044     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.389068     Document Type: Conference Paper

References (9)