3-D micro-structuring with F2 lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4075, Issue , 2000, Pages 159-166

  Tonshoff, H K ^a   von Alvensleben, F ^a   Ostendorf, A ^a   Koerber, K ^a   Kulik, C ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER SIMULATION; ENCAPSULATION; EXCIMER LASERS; FUSED SILICA; INTEGRATED CIRCUIT MANUFACTURE; LASER ABLATION; LASER PULSES; MASKS; MICROMACHINING; POLYTETRAFLUOROETHYLENES;

FLUORINE LASERS; MATERIAL PROCESSING; MICROSTRUCTURING; VACUUM ENCAPSULATION;

INTEGRATED OPTOELECTRONICS;

EID: 0033696893     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)