Ultrasonic micromixer for microfluidic systems

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 80-85

  Yang, Zhen ^a   Goto, Hiroshi ^a   Matsumoto, Mikio ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENT MICROSCOPES; MICROFLUIDIC SYSTEMS; ULTRASONIC MICROMIXERS;

BONDING; CAMERAS; CERAMIC MATERIALS; DIAPHRAGMS; ENCAPSULATION; LAMINAR FLOW; MICROSCOPES; OSCILLATIONS; PIEZOELECTRIC DEVICES; SILICON WAFERS; ULTRASONIC DEVICES; VIBRATIONS (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 0033692458     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (30)