Optical properties of nanocrystalline silicon films with different deposition temperatures

Materials Research Society Symposium - Proceedings

Volumn 581, Issue , 2000, Pages 565-570

  Ali, A M ^a   Inokuma, T ^a   Kurata, Y ^a   Hasegawa, S ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLIZATION; HYDROGENATION; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL EFFECTS;

INFRARED ABSORPTION BAND; PLASMA ASSISTED HYDROGENATION;

SILICON;

EID: 0033692021     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (21)