Developing a web-enabled equipment driver for semiconductor equipment communications

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 2000, Pages 2203-2210

  Cheng, Fan Tien ^a   Lin, Meng Tsang ^a   Lee, Rong Shean ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMMON OBJECT REQUEST BROKER ARCHITECTURE; GENERIC EQUIPMENT MANAGER; MANUFACTURING EXECUTION SYSTEM; MOBILE OBJECT TECHNOLOGY; PLUG AND PLAY FASHION; WEB ENABLED EQUIPMENT DRIVER;

CLIENT SERVER COMPUTER SYSTEMS; INTERFACES (COMPUTER); JAVA PROGRAMMING LANGUAGE; MOBILE ROBOTS; NETWORK PROTOCOLS; OBJECT ORIENTED PROGRAMMING; SEMICONDUCTOR DEVICE MANUFACTURE;

AUTOMATION;

EID: 0033691982     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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