Reliability evaluation method of low temperature poly-silicon TFTs using dynamic stress

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2000, Pages 158-162

  Uraoka, Y ^a   Hatayama, T ^a   Fuyuki, T ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; LOW TEMPERATURE PROPERTIES; RELIABILITY; SEMICONDUCTING SILICON; THIN FILM TRANSISTORS;

DYNAMIC STRESS; LOW TEMPERATURE POLYSILICON; RELIABILITY EVALUATION METHOD;

INTEGRATED CIRCUIT TESTING;

EID: 0033690338     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)