Efficient reduced order modeling for system simulation of micro electro mechanical systems (MEMS) from FEM models

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 50-54

  Affour, Bachar ^a   Nachtergaele, Philippe ^a   Spirkovitch, Stevan ^a   Ostergaard, Dale ^a   Gyimesi, Miklos ^a  

^a Egypt   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FINITE ELEMENT METHOD; HIGH LEVEL LANGUAGES; MATHEMATICAL MODELS;

SOFTWARE PACKAGE ANSYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033688831     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)