MEMS IC test probe utilizing fritting contacts

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 244-249

  Itoh, Toshihiro ^a   Kataoka, Kenichi ^a   Engelmann, Gunter ^a   Wolf, Juergen ^a   Ehrmann, Oswin ^a   Reichl, Herbert ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT TESTING; MICROACTUATORS; MICROMACHINING; PROBES;

FRITTING CONTACTS; WAFER PROBE CARDS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033688829     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)