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Volumn 4019, Issue , 2000, Pages 516-525
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Silicon optoelectronic integrated circuits for MOEMS
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
INTEGRATED CIRCUIT MANUFACTURE;
INTEGRATED OPTOELECTRONICS;
LOGIC CIRCUITS;
MICROELECTRONIC PROCESSING;
MICROSENSORS;
OPTICAL WAVEGUIDES;
PHOTODETECTORS;
PHOTONIC PROPULSION;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MODELS;
TRANSISTORS;
PHOTONIC CIRCUITS;
PHOTOTRANSISTORS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0033688410
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
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References (26)
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