Advancements in organic anti-reflective coatings for Dual Damascene processes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 797-805

  Deshpande, Shreeram ^a   Shao, Xie ^a   Lamb III, James ^a   Brakensiek, Nick ^a   Johnson, Joe ^a   Wu, Xiaoming ^a   Xu, Gu ^a   Simmons, Bill ^a  

^a BREWER SCIENCE INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; COPPER; ETCHING; INTERCONNECTION NETWORKS; SEMICONDUCTOR DEVICE MANUFACTURE; SPATIAL VARIABLES CONTROL;

CRITICAL DIMENSIONS (CD); DUAL DAMASCENE (DD) PROCESS;

PHOTORESISTS;

EID: 0033686035     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)