Thermal actuation of a GaAs cantilever beam

Journal of Micromechanics and Microengineering

Volumn 10, Issue 2, 2000, Pages 293-298

  Lalinsky T ^a   Burian, E ^a   Drzik M ^b   Hašcík, Š ^a   Mozolová, Ž ^a   Kuzmik J ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INSTITUTE OF CONSTRUCTION AND ARCHITECTURE   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; MOLECULAR BEAM EPITAXY; THERMOMECHANICAL TREATMENT; TWO DIMENSIONAL;

THERMAL ACTUATION; TWO DIMENSIONAL NUMERICAL MODELING;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0033685869     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/2/332     Document Type: Article

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