EUV nanolithography: Sub-50 nm L/S

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 794-798

  Li, Waikin ^a   Solak, Harun H ^a   Cerrina, Franco ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON RING ACCELERATORS; INTERFEROMETERS; MIRRORS; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; STORAGE RINGS; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET NANOLITHOGRAPHY; PATTERN TRANSFER; UNDULATORS;

PHOTORESISTS;

EID: 0033685436     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)