Development of an electric capillary discharge source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 120-125

  Fornaciari, Neal R ^a   Chang, J J ^a   Folk, Daniel R ^a   Gianoulakis, Steve ^a   Goldsmith, John E M ^a   Kubiak, Glenn D ^a   Long, Bruce C ^a   O'Connell, Donna J ^a   Shimkaveg, Greg ^a   Silfvast, William T ^a   Stewart, Kenneth D ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODES; IMAGE QUALITY; MATHEMATICAL MODELS; PLASMA SOURCES; THERMAL VARIABLES MEASUREMENT; ULTRAVIOLET RADIATION;

ELECTRIC CAPILLARY DISCHARGE SOURCES; ELECTRIC PULSES; EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); PLASMA DISCHARGE SOURCES; THERMAL MANAGEMENT;

PHOTOLITHOGRAPHY;

EID: 0033685425     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)