Effects of O2 gas addition on diamond-like carbon film deposition

Materials Research Society Symposium - Proceedings

Volumn 593, Issue , 2000, Pages 415-419

  Nakamura, N ^a   Itani, T ^a   Chiba, H ^a   Watanabe, K ^a   Kurihara, K ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; ARGON; GRAPHITE; LUBRICANTS; MAGNETIC DISK STORAGE; MAGNETRON SPUTTERING; METHANE; OXYGEN; RAMAN SPECTROSCOPY; SURFACES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILM; FILM QUALITY; HARD DISK DRIVE; OXYGEN MIXING RATIO;

CARBON;

EID: 0033685305     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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