Spatial frequency filtering in the pellicle plane

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Smith, Brace W ^a   Kang, Hoyoung ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; LENSES; LIGHT INTERFERENCE; MASKS; OPTICAL FILTERS; OPTICAL RESOLVING POWER;

PUPIL FILTERING; SPATIAL FREQUENCY FILTERING;

PHOTOLITHOGRAPHY;

EID: 0033684967     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)