Dynamic change of transmission of CaF2 single crystals by irradiating with ArF excimer laser light

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000 (II), Issue , 2000, Pages 1568-1573

  Alkemper, Jochen ^a   Kandler, Joerg ^a   Strenge, Lorenz ^a   Moersen, Ewald ^a   Muehlig, Christian ^a   Triebel, Wolfgang ^a  

^a Schott ML GmbH ^*  (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM COMPOUNDS; EXCIMER LASERS; LIGHT ABSORPTION; LIGHT TRANSMISSION; SINGLE CRYSTALS;

DAMAGE RESISTANCE; EXPONENTIAL DEPENDENCE; LASER INDUCED ABSORPTION; PULSE ENERGY DENSITY; REACTION EQUILIBRIUM; REACTION REVERSIBILITY;

PHOTOLITHOGRAPHY;

EID: 0033684896     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.389004     Document Type: Conference Paper

References (6)