Experimentation and modeling of organic photocontamination on lithographic optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000 (I), Issue , 2000, Pages 474-487

  Kunz, R R ^a   Liberman, V ^a   Downs, D K ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; DEPOSITION; FILM GROWTH; HYDROCARBONS; LIGHT ABSORPTION; OPTICAL FILMS; SUBSTRATES;

ORGANIC PHOTOCONTAMINATION; PHOTODEPOSITION;

PHOTOLITHOGRAPHY;

EID: 0033684528     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.389036     Document Type: Conference Paper

References (20)