Across field and across wafer flare: From KrF stepper to ArF scanner

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000 (II), Issue , 2000, Pages 880-891

  Trouiller, Y ^a   Luce, E ^a   Barberet, A ^a   Depre, L ^a   Schiavone, P ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL COATINGS; SILICON WAFERS; STRAY LIGHT;

ACROSS FIELD FLARE VARIATIONS (AFFV); ACROSS WATER FIELD VARIATIONS (AWFV);

SCANNING;

EID: 0033684516     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.389084     Document Type: Conference Paper

References (3)