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Volumn 593, Issue , 2000, Pages 305-310
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Oriented graphitic carbon film grown by mass-selected ion beam deposition at elevated temperatures
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON;
COMPRESSIVE STRESS;
CRYSTAL ORIENTATION;
DEPOSITION;
ELECTRON DIFFRACTION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
FILM GROWTH;
ION BEAMS;
MOLECULAR DYNAMICS;
NANOSTRUCTURED MATERIALS;
SILICON;
TRANSMISSION ELECTRON MICROSCOPY;
BIAXIAL STRESS;
BRAGG DIFFRACTION;
CARBON FILM;
MASS SELECTED ION BEAM DEPOSITION;
TRANSMISSION ELECTRON DIFFRACTION;
THIN FILMS;
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EID: 0033684187
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (12)
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References (16)
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