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Volumn 593, Issue , 2000, Pages 523-528
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Amorphous carbon-silicon alloys prepared by a high plasma density source
a a,b a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
BONDING;
CARBON;
COMPOSITION;
COMPOSITION EFFECTS;
COMPRESSIVE STRESS;
ELECTRON CYCLOTRON RESONANCE;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
SILICON;
THERMODYNAMIC STABILITY;
X RAY PHOTOELECTRON SPECTROSCOPY;
AMORPHOUS CARBON SILICON ALLOYS;
BAND GAP;
HYDROGENATED AMORPHOUS CARBON;
AMORPHOUS ALLOYS;
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EID: 0033684019
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (16)
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