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Volumn 593, Issue , 2000, Pages 523-528

Amorphous carbon-silicon alloys prepared by a high plasma density source

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CARBON; COMPOSITION; COMPOSITION EFFECTS; COMPRESSIVE STRESS; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILICON; THERMODYNAMIC STABILITY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0033684019     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (16)
  • 11


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.