Processing latitude study of X-ray phase shifting masks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 530-538

  Yang, Lei ^a   Khan, Mumit ^a   Taylor, James W ^a   Vladimirsky, Yuli ^a   Dandekar, Niru V ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ENERGY GAP; MASKS; PHASE SHIFT;

CRITICAL DIMENSION (CD);

X RAY LITHOGRAPHY;

EID: 0033683762     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)