OPC methodology and implementation to prototyping of small SRAM cells of 0.18 μm node logic gate levels

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  He, Qizhi ^a   Chang, Mi Chang, ^a   Palmer, Shane ^a   Sadra, Kayvan ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSING; LOGIC GATES; RANDOM ACCESS STORAGE; SEMICONDUCTOR DEVICE STRUCTURES;

DEEP ULTRAVIOLET LITHOGRAPHY; OPTICAL PROXIMITY CORRECTION;

PHOTOLITHOGRAPHY;

EID: 0033683266     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)