New cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2000, Pages 106-107

  Itoh, H ^a   Tsunemine, Y ^a   Yutani, A ^a   Okudaira, T ^a   Kashihara, K ^a   Inuishi, M ^a   Yamamuka, M ^a   Kawahara, T ^a   Horikawa, T ^a   Ohmori, T ^a   Satoh, S ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; ELECTRODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLATINUM ALLOYS; STRONTIUM COMPOUNDS;

DAMASCENE SCHEME; PEDESTAL ELECTRODES; PHYSICAL VAPOR DEPOSITION (PVD);

CAPACITORS;

EID: 0033683019     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)