EUV holographic aerial image recording

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3997, Issue , 2000, Pages 823-828

  Lee, Sang Hun ^a   Naulleau, Patrick ^a   Goldberg, Kenneth A ^a   Cho, Chang Hyun ^a   Bokor, Jeffrey ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; FOURIER TRANSFORMS; HOLOGRAPHY; IMAGE RECORDING; INTERFEROMETRY; OPTICAL SYSTEMS; PHASE SHIFT; ULTRAVIOLET RADIATION;

AERIAL IMAGE RECORDING; EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); POINT DIFFRACTION INTERFEROMETRY;

PHOTOLITHOGRAPHY;

EID: 0033682560     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)