SiGe heterojunctions in epitaxial vertical surrounding-gate MOSFETs

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2000, Pages 36-37

  Date, Celisa K ^a   Plummer, James D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; GATES (TRANSISTOR); HETEROJUNCTIONS; HOT CARRIERS; MOSFET DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH;

FLOATING BODY EFFECT;

VLSI CIRCUITS;

EID: 0033682460     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)