Accuracy of diffused aerial image model for the full chip level optical proximity correction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Hong, Ji Suk ^a   Kim, Hee Bom ^a   Yune, Hyoung Soon ^a   Ahn, Chang Nam ^a   Koo, Yung Mo ^a   Baik, Ki Ho ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; MATHEMATICAL MODELS; OPTICAL DATA STORAGE; OPTICAL VARIABLES MEASUREMENT;

CRITICAL DIMENSION (CD); DIFFUSED AERIAL IMAGE MODEL (DAIM); DUTY PATTERNS; OPTICAL PROXIMITY CORRECTION (OPC);

PHOTOLITHOGRAPHY;

EID: 0033682313     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)