KrF lithography for 130 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Finders, Jo ^a   van Schoot, Jan ^a   Vanoppen, Peter ^a   Dusa, Mircea ^a   Socha, Bob ^a   Vandenberghe, Geert ^a   Ronse, Kurt ^a  

^a ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; EXCIMER LASERS; MASKS;

KRYPTON FLUORIDE LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0033681594     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)