Sub-micron period grating structures in Ta2O5 and InOx thin oxide films, fabricated using 248 nm interferometric excimer laser ablation

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2000, Pages 212-

  Pissadakis, S ^a   Reekie, L ^a   Wilkinson, J S ^a   Kiriakidis, G ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; EXCIMER LASERS; INDIUM COMPOUNDS; LASER ABLATION; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; TANTALUM COMPOUNDS; THIN FILMS;

INTERFEROMETRIC LASER ABLATION;

OXIDES;

EID: 0033681280     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)