Kinetics of boron activation

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 2000, Pages 163-166

  Mokhberi, Ali ^a   Griffin, Peter B ^a   Plummer, James D ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ANALYSIS; HALL EFFECT; REACTION KINETICS; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

BORON-INTERSTITIAL CLUSTERS (BIC);

SEMICONDUCTING BORON;

EID: 0033680934     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)