New high resolution liquid crystal electron beam resists

Materials Research Society Symposium - Proceedings

Volumn 584, Issue , 2000, Pages 129-134

  Robinson, A P G ^a   Palmer, R E ^a   Tada, T ^a   Kanayama, T ^a   Allen, M T ^a   Preece, J A ^a   Harris, K D M ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; DISSOLUTION; DURABILITY; ELECTRON BEAM LITHOGRAPHY; FILM PREPARATION; ORGANIC SOLVENTS; PLASMA ETCHING; SEMICONDUCTING SILICON; SOLUBILITY;

ELECTRON BEAM RESISTS; HEXAPENTYLOXYTRIPHENYLENE; SPIN COATING;

LIQUID CRYSTAL POLYMERS;

EID: 0033678093     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (28)