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Volumn 584, Issue , 2000, Pages 293-303
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Nanostructure fabrication using electron beam
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER GENERATED HOLOGRAPHY;
LASER APPLICATIONS;
MOSFET DEVICES;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
POLYMETHYL METHACRYLATES;
ATOMIC BEAM HOLOGRAPHY;
ELECTRON BEAM HOLOGRAPHY;
ELECTRON BIPRISM;
LASER TRAP TECHNIQUE;
MATERIAL WAVE NANOTECHNOLOGY;
THERMAL FIELD EMITTER GUN;
ELECTRON BEAM LITHOGRAPHY;
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EID: 0033678050
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (1)
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References (22)
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