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Volumn 4065, Issue , 2000, Pages 868-875
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New material processing of AlN ceramic with fs, ns and μs laser ablation
a
a
KEIO UNIVERSITY
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
CARBON DIOXIDE LASERS;
CERAMIC MATERIALS;
EXCIMER LASERS;
LASER PULSES;
NITRIDES;
SCANNING ELECTRON MICROSCOPY;
SOLID STATE LASERS;
SURFACE TREATMENT;
THERMAL EFFECTS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ALUMINUM NITRIDE CERAMIC;
FIELD EMISSION SCANNING ELECTRON MICROSCOPY;
KRYPTON FLUORIDE EXCIMER LASER PULSE;
MATERIAL PROCESSING;
LASER ABLATION;
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EID: 0033675775
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.407315 Document Type: Conference Paper |
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Times cited : (1)
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References (8)
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